Wake-up free ferroelectric hafnia-zirconia capacitors fabricated via vacuum-maintaining atomic layer deposition Journal of Applied Physics>10.1063/5.0147124 Schlagwörter 2023, JAP
Using Raman spectroscopy and x-ray diffraction for phase determination in ferroelectric mixed Hf1−xZrxO2-based layers Journal of Applied Physics>10.1063/5.0119871 Schlagwörter 2022, JAP