Demonstration of Fatigue and Recovery Phenomena in Hf0.5Zr0.5O2-based 1T1C FeRAM Memory Arrays

6th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2022
>10.1109/EDTM53872.2022.9797943

BEOL Integrated Ferroelectric HfO2based Capacitors for FeRAM

6th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2022
>10.1109/EDTM53872.2022.9798048