Demonstration of Fatigue and Recovery Phenomena in Hf0.5Zr0.5O2-based 1T1C FeRAM Memory Arrays 21. Juni 2022 6th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2022>10.1109/EDTM53872.2022.9797943 Schlagwörter 2022, EDTM 2022